Kimura, Keiichi, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology, Iizuka, Fukuoka, Japan Presently, Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, 106 Taiwan

• Vol 7, No 3 (2014) - Research Articles
  Study on Variable Rotation Polishing Method in Chemical Mechanical Polishing Process
  Abstract  PDF